Inner liner barrier from multilayer thin film
J. C. Grunlan, M. A. Priolo, B. R. Bergman, John J. McHugh, “Inner liner barrier from multilayer thin film,” U.S. Patent 10,195,642 (issued February 5, 2019).
J. C. Grunlan, M. A. Priolo, B. R. Bergman, John J. McHugh, “Inner liner barrier from multilayer thin film,” U.S. Patent 10,195,642 (issued February 5, 2019).